2023
Optimizing high concentration Scandium Aluminum Nitride films
- by Sergey Mishin, Yury Oshmyansky
- 2023 IEEE ULTRASONICS SYMPOSIUM
LEADER IN PIEZOELECTRIC THIN FILM PROCESSING EQUIPMENT
Publications
2023
Reducing impact of stress on coupling coefficient in 30% Scandium Aluminum Nitride films
- by Sergey Mishin, Yury Oshmyansky
- 2023 IEEE FREQUENCY CONTROL SYMPOSIUM
2020
Liquid-Loaded Piezo-Silicon Micro-Disc Oscillators for Pico-Scale Bio-Mass Sensing
- by Hakhamanesh Mansoorzare, Sarah Shahraini, Ankesh Todi, Nilab Azim, Swaminathan Rajaraman, Reza Abdolvand
- 2020 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2020
Near-Carrier Phase Noise Suppression at Turnover Temperature in a Thin-Film Piezoelectric-on-Silicon Oscillator
- by Yasaman Majd , Sarah Shahraini , Garett Goodale, Heather Hofstee, Hossein Miri Lavasani, Reza Abdolvand
- 2020 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
2020
Thickness-Lamé Thin-Film Piezoelectric-on-Silicon Resonators
- by Sarah Shahraini, Hakhamanesh Mansoorzare , Amirreza Mahigir, Reza Abdolvand
- 2020 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 29, NO. 3, JUNE 2020
2019
Magnetron Deposition of AlN and ScAlN for Massproduction for BAW Devices and MEMS
- by Sergey Mishin, Yury Oshmyansky
- IEEE ULTRASONICS SYMPOSIUM
2018
Stress control for highly doped Aluminum Scandium Nitride films
- by Sergey Mishin, Yury Oshmyansky
- IEEE ULTRASONICS SYMPOSIUM
2018
Improving crystallinity of high concentration Scandium Aluminum Nitride films deposited on 200mm wafers
- by Sergey Mishin, Yury Oshmyansky
- 2018 PIEZOMEMS Orlando
2018
Experimental investigation of damping factors in 20% scandium-doped aluminum nitride laterally vibrating resonators
- by Zachary A. Schaffer, Luca Colombo, Abhay S. Kochhar, Gianluca Piazza, Sergey Mishin, Yury Oshmyansky
- 2018 IEEE MEMS Conference Belfast
2017
Investigation of 20% Scandium-doped Aluminum Nitride Films for MEMS Laterally Vibrating Resonators
- by Luca Colombo, Abhay Kochhar, Changting Xu, Gianluca Piazza, Sergey Mishin, Yury Oshmyansky
- 2017 IEEE ULTRASONICS SYMPOSIUM
2017
Improving coupling coefficient distribution on BAW filters manufactured on 200mm wafers
- by Sergey Mishin, Yury Oshmyansky
- 2017 IEEE FREQUENCY CONTROL SYMPOSIUM
2017
Design, Fabrication and Characterization of Scandium Aluminum Nitride Based Piezoelectric...
- by Qi Wang, Yipeng Lu, Sergey Mishin, Yury Oshmyansky, David A. Horsley
- 2017 Journal of Microelectromechanical Systems
2016
Improving Manufacturability of FBAR filters on 200mm wafers
- by Sergey Mishin, Yury Oshmyansky
- 2016 IEEE FREQUENCY CONTROL SYMPOSIUM
2016
AlN Film Stress and Uniformity for BAW filters on 200mm wafers
- by Sergey Mishin, Yury Oshmyansky
- 2016 IEEE ULTRASONICS SYMPOSIUM
2016
Scandium doped Aluminum Nitride based piezoelectric micromachined ultrasound transducers
- by Q. Wang1, Y. Lu, S. Fung, X. Jiang, S. Mishin, Y. Oshmyansky, D.A. Horsley
- 2016 Hilton Head Workshop, A Solid-State Sensors, Actuators and Microsystems Workshop
2016
Method of fabricating piezoelectric material with selected c-axis orientation
- by John Larson, III, Sergey Mishin
- -2016 US Patent US 9.243,316 B2
2015
Operation modes of the FALCON ion source as a part of the AMS cluster tool
- by Oleksii Girka, Alexander Bizyukov, Ivan Bizyukov, Michael Gutkin, Sergei Mishin
- NUKLEONIKA 2015;60(2):327 330 doi: 10.1515/nuka-2015-0059
2015
Manufacturability of highly doped Aluminum Nitride films
- by Sergey Mishin, Yury Oshmyansky
- 2015 IEEE FREQUENCY CONTROL SYMPOSIUM.
2014
Production worthy system for piezoelectric multi-material depositions
- by Sergey Mishin, Michael Gutkin
- 2014 IEEE FREQUENCY CONTROL SYMPOSIUM.
2013
Improving frequency Control of Temperature Compensated Surface Acoustic Wave Devices
- by Sergey Mishin, Michael Gutkin, Alexander Bizyukov, Vladimir Sleptsov
- 2013 IEEE FREQUENCY CONTROL SYMPOSIUM.
2013
Method of controlling coupling coefficient of Aluminum Scandium Nitride deposition in high ...
- by Sergey Mishin, Michael Gutkin, Alexander Bizyukov, Vladimir Sleptsov
- 2013 IEEE FREQUENCY CONTROL SYMPOSIUM.
2012
Production Issues in Using Silicon Dioxide Films for Temperature Compensated Bulk Surface ...
- by Sergey Mishin, Michael Gutkin
- 2012 IEEE FREQUENCY CONTROL SYMPOSIUM.
2011
Improving Manufacturability of Bulk Acoustic Wave and Surface Acoustic Wave Devices
- by Sergey Mishin
- 2011 IEEE SPAWDA.
2011
Effect of Substrate Material and Electrode Surface Preparation on Stress and Piezoelectric ...
- by Sergey Mishin
- 2011 IEEE FREQUENCY CONTROL SYMPOSIUM.
2010
Characterization of Reversed c-axis AlN Thin Films
- by John D. Larson III (Fellow), Sergey Mishin, Stefan Bader
- 2010 IEEE ULTRASONICS SYMPOSIUM.
2010
Practical issues with ion beam milling in acoustic wave resonator technologies
- by Sergey Mishin, Yury Oshmyansky and Frank Bi
- 2010 NANO-TECH CONFERENCE.
2010
Thickness Control by Ion Beam Milling in Acoustic Resonator Devices
- by Sergey Mishin, Yury Oshmyansky and Frank Bi
- 2010 IEEE FREQUENCY CONTROL SYMPOSIUM.
2009
RF Bulk Acoustic Wave Filters for Communications
- by Sergey Mishin, Yury Oshmyansky
- Ken-ya Hashimoto, Artech House, 2009 | Chapter 7. Thin Films Deposition for BAW devices
2008
Damage-Free Cathode Coating Process for OLEDs
- by Shiva Prakash, DuPont Displays
- 2008 SID INTERNATIONAL SYMPOSIUM.
2005
Improving Manufacturability of AlN Deposition Used in Making Bulk Acoustic Wave Devices
- by Sergey Mishin, Brian Sylvia and Daniel R. Marx
- 2005 IEEE ULTRASONICS SYMPOSIUM.
2004
Magnetron with Controlled DC Power
- by Yury Oshmyansky, Sergey Mishin, Richard Ruby, John Larson
- 2004 US Patent US 6,824,653 B2.
2003
Sputtered AlN Thin Films on Si and Electrodes for MEMS Resonators: Relationship Between ...
- by S. Mishin, D. R. Marx and B. Sylvia, V. Lughi, K. L. Turner, and D. R. Clarke
- 2003 IEEE ULTRASONICS SYMPOSIUM.
2003
Sputtering Processes for Bulk Acoustic Wave Filters
- by Sergey Mishin, Yury Oshmyansky, John D. Larson Ph.D., Richard Ruby Ph.D.
- Semiconductor International, 3/1/2003.