Ion Beam Film Thickness and Frequency Trimming/Tuning

AMSytems supplies different configurations of the Trimming system:

Single trimming module with semi-manual load
Trimming System with multiple Trimming Modules or combination of Trimming and PVD modules on the same platform

Up to 50X ultimate thickness uniformity improvement
Zero minimum thickness loss if needed (patent pending)
Film thickness distribution adjustment to +/- 4A
Surface Roughness Improvement
Simple and robust transfer mechanism
DC based Ion Source with Hollow Cathode Neutralizer - no filaments, no grids, simple maintenance, high up time
Millisecond response time
Thickness adjustment - of any Conductive and Non-conductive films
Cluster Tool combines Trimming and PVD Modules for robust and economically advantageous approach to high scale manufacturing
A computer running standard Microsoft Windows software allows users to easily and intuitively operate the system
The use of standardized modules and components minimizes the variety of additional parts required since many parts are interchangeable